Lee J., Kim K.

Accurate modeling of complex dynamic stiffness of the pneumatic springs is crucial for an efficient design of vibration isolation tables for precision instruments such as optical devices or nano-technology equipments. Besides pressurized air itself, diaphragm made of rubber materials, essentially employed for prevention of air leakage, plays a significant contribution to the total complex stiffness. Therefore, effects of the diaphragm should be taken care of precisely. The complex stiffness of an inflated diaphragm is difficult to predict or measure, since it is always working together with the pressurized air. In our earlier research, the complex stiffness of a diaphragm was indirectly estimated simply by subtracting stiffness of the pressurized air from measurement of the total complex stiffness for a single chamber pneumatic spring. In order to reflect dynamic stiffness of inflated diaphragm on the total stiffness at the initial design or design improvement stage, however, it is required to be able to predict beforehand. In this presentation, how to predict the complex stiffness of inflated rubber diaphragm by commercial FE codes ( e.g. ABAQUS) will be discussed and the results will be compared with the indirectly measured values.