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Abstracts & Full Papers
751 - Parametric resonance in a capacitive mems
D'Angola A.
Abstract
Microelectromechanical systems (MEMS) have gained enormous importance in the last years and have been proposed for many applications (such as chemical and mass sensors, optic detectors, accelerometers, filters, optical switches). The dynamics of a capacitive MEMS system composed of a mechanical resonator and two symmetrical variable capacitors is described. The oscillation of the mass is parametrically excited by a sinusoidal voltage signal. The dynamics is described by a set of ODEs with coefficients periodic in time and where the equation of motion of the oscillating mass is coupled with two first-order equations for the charge through strongly-nonlinear terms. The nonlinear regimes are analyzed with a semi-analytical approach. A nonlinear Mathieu equation is used to analyze nonlinear effects on parametric resonance.
Citation
D'Angola A.: Parametric resonance in a capacitive mems, CD-ROM Proceedings of the Thirtheenth International Congress on Sound and Vibration (ICSV13), July 2-6, 2006, Vienna, Austria, Eds.: Eberhardsteiner, J.; Mang, H.A.; Waubke, H., Publisher: Vienna University of Technology, Austria, ISBN: 3-9501554-5-7