070 - Residual vibrations of electrostatic micro-actuators with different electrode shapes
Hsu M.
Abstract
This paper presents the nonlinear dynamic analysis of electrostatic curved electrode actuators using differential quadrature method. Analysis results are compared with the experimental results to present the efficient and systematic procedure of this new approach for nonlinear differential equations. For the purpose to optimize the design, several characters of different combination of shaped cantilever and curved electrode are also observed in this paper. A new efficient and systematic approach using differential quadrature method has been presented for electrostatic actuators with shaped cantilever and curved electrode. The dynamic responses of uniform actuator and non-uniform actuator solved using the differential quadrature method are efficient. In this approach, only nine sample points are needed to achieve convergence. Dynamic responses of non-uniform actuator with various voltages are determined. The transitional responses of the derived systems are calculated by using Newmark method. The non-uniform actuators with external damping and internal damping are considered.
Citation
Hsu M.: Residual vibrations of electrostatic micro-actuators with different electrode shapes, CD-ROM Proceedings of the Thirtheenth International Congress on Sound and Vibration (ICSV13), July 2-6, 2006, Vienna, Austria, Eds.: Eberhardsteiner, J.; Mang, H.A.; Waubke, H., Publisher: Vienna University of Technology, Austria, ISBN: 3-9501554-5-7
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